One Semiconductor was founded in 2011 with a focus on the refurbishment of Applied Materials equipment. In 2013, One Semi expanded the operation to support a various number of 200 mm fabs located in the United States.
Customers refer to One Semi as experts in Applied Materials CVD, PVD, RTP, Etch and Lam Etch technologies. Also providing field service for Hitachi SEM, Varian & AMAT Implant and AMAT CMP.
2
Chamber & System Reconfiguration, Upgrades and Process Changes
Wafer Size Conversions
Process Conversions
Gas Panel reconfiguration or customization
PVD Chamber including Magnet, Pedestal, Heater, ESC Conversions
HDP Ultima to Ultima+, ENI Generators, WTM, 3 Piece Lid
XE to XE+, O2 Monitors
MxP to MxP+
Centura DPS and ASP Upgrades
Wafer Handling conversions and upgrades.
Custom Projects for non-typical usage. Wafer Carriers, Square and clear substrates, Lab and Development considerations.
3
Laser Based Wafer Orientation
High accuracy and repeatability
Fast measurement speed
Non-contact and non-destruc8ve measurement method
Suitable for use in cleanroom and high vacuum environments
Chamber viewport imperfec8ons are compensated for via calibra8on during installation
Easy to use and integrate into exis8ng manufacturing processes
Customer configurable via touch GUI seDngs screen
Dust covers to ensure repeatable accurate orienta8ons
Wafer size: 150mm and 200mm in diameter
Supports different substrates: silicon, quartz, glass, sapphire, and silicon carbide
Supports different wafer shapes: SNNF, JMF, and SMF
Plug and play compa8ble with OEM stepper motor and connectors
Easy troubleshoo.ng and debugging via GUI