Trillium specializes in providing world-class vacuum pump repair, new and refurbished pumping systems, as well as accessories, spare parts and consumables. Our entire organization is dedicated to learning about your particular business needs and challenges, and working with you to ensure your success.
1
Cryo Pump
Models Serviced:
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Trillium Cryoplex®: CP8, CP8 LP, CP10, CP16
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CTI CryoTorr®: CT100, CT4, CT4F, CT7, CT8, CT8F, CT10, CT10F, CT250F, CT400, CT500
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CTI OnBoard®: OB 4, OB 4F, OB 8, OB 8F, OB 10, OB 250F, OB 400, and OB500
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CTI IS OnBoard®: IS OB 8F, IS OB 250F, IS OB 320FE​
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Service Scope of Work:
Vacuum Side
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Complete Disassembly and Ultrasonic Cleaning
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Replace: 15K condensing array (charcoal array), silicon diode (if equipped), indium gaskets, o-rings
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Inspect and Test:* 80K condensing array (inlet array), radiation shield, hydrogen vapor gauge (if equipped)
​Helium Side
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Replace: First and second stage displacer Seals, motor bearings, upper/lower bushings and exhaust valve body
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Inspect and Test:* Scotch yoke, valve stems, rocker arms, crankshaft, displacers and helium PRV
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Set valve timing, remagnetize motor and test inlet valve​
Commitment to Quality
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Repaired to Meet or Exceed OEM Specifications
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24 Hour and Multiple Regeneration Testing
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Temperature and Pressure Versus Time Testing
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Reset Run Hours for OnBoard® Pumps
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RGA and Helium Leak Test/Sniff
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Certificate of Conformance Supplied​
2
Vacuum Pump, Chiller, and Abatement Refurb Services
Affinity/Lauda
Lam
M&W
Neslab (Thermo and Thermo Fisher)
SMC
Trillium (Formerly BOC Edwards)
3
Surplus Refurbished Pump, Chiller, and Abatement sales
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Call IQW for more information